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Diamond Annealing Process System

An ultra high temperature annealing reactor

1800°C

Combining an RCT-AM2H-T-1800 tube furnace model with a TurboMolecular pumping station and a series of Mass Flow Controllers integrated by the Pyromodular PM-GFP module unit, our team developed an ultra-high temperature annealing reactor.

This system includes a vacuum system downstream of the reactor and a gas flow system upstream. The gas flow system comprises the necessary manifold, valves, and three Mass Flow Controllers to control the flow of corresponding number of gases: nitrogen, argon, and hydrogen, each ranging from 0 to 1000 mlpm.

The reactor is equipped with a pair of GSF_A flange End Gas Sealing Flanges and it is covered from the tube furnace RCT-AM2H-T-D2L12_1800 allowing heat up to 1750C continuously.
Both flanges have an NW16KF clamp flange for easy reactor loading access.

The basic unit of the vacuum system is a Turbomolecular station (Pfeiffer HiCube 80), which provides vacuum up to 10^-6 torr. The system can first evacuate the reactor to this level to reduce oxygen levels, and subsequently, allow gas flow through the reactor. Downstream of the reactor, a set of valves allows for vacuum pumping station isolation and gas exhaust.

The system is fully software controlled and monitored. Using Pyrologism 2.0 software as a base, we expanded the software capabilities to include the system’s extra functionality.

The screenshot beside shows the Pyrologism tab specifically developed for the operation of the unit’s additional features.