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Ensuring uniform attachment of the heat-treated substrate to the heated surface and significantly enhancing heat transfer
THERMANSYS designed its HTP-MA1-200_PRF Vacuum Chuck Heated Plates family to offer precise and uniform surface temperature control. Featuring a perforated plate on top of the heated body, this design allows for air suction through the holes, ensuring uniform attachment of the heat-treated substrate to the heated surface and significantly enhancing heat transfer. These plates are an ideal choice for heating thin film substrates, wafers, or flexible membranes.
| Model Part Number | Heated Surface LxW (mm) | External LxW (mm) | Nominal Max. Power (W) |
|---|---|---|---|
|
HTP-MA1-L18W18-200_PRF |
180×180 |
280×240 |
800 |
|
HTP-MA1-L26W26-200_PRF |
260×260 |
360×320 |
1000 |
|
HTP-MA1-L30W18-200_PRF |
300×180 |
400×240 |
1200 |
|
HTP-MA1-L30W30-200_PRF |
300×300 |
400×360 |
1600 |
|
HTP-MA1-L40W18-200_PRF |
400×180 |
500×240 |
1600 |
|
HTP-MA1-L35W35-200_PRF |
350×350 |
450×410 |
1800 |
|
HTP-MA1-L40W30-200_PRF |
400×300 |
500×360 |
1800 |
|
HTP-MA1-L40W40-200_PRF |
400×400 |
500×460 |
2000 |
Ordering Example:
HTP-MA1-L40W18-200_PRF: This Part Number includes one HTP-MA1-200 PRF Precision Heated Plate having 400x180mm heated
surface.
Thermanys, a leading technology firm, is relied upon by prestigious technical universities, research centers, and private high-tech laboratories. Our objective is to develop exceptionally reliable and cutting-edge products, prioritizing user ease-of-use as a central strategy.
Thermanys, a leading technology firm, is relied upon by prestigious technical universities, research centers, and private high-tech laboratories. Our objective is to develop exceptionally reliable and cutting-edge products, prioritizing user ease-of-use as a central strategy.
