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HTP-MB1-200_PRF

Ensuring uniform attachment of the heat-treated substrate to the heated surface and significantly enhancing heat transfer

200°C

THERMANSYS designed its HTP-MB1-200_PRF Vacuum Chuck Heated Plates family to offer precise and uniform surface temperature control. Featuring a perforated  plate on top of the heated body, this design allows for air suction through the holes, ensuring uniform attachment of the heat-treated substrate to the heated surface and significantly enhancing heat transfer. These plates are an ideal choice for heating thin film substrates, wafers, or flexible membranes.

Ordering Info

Standard Features and Specifications

Optional Features

Technical Data

Model Part Number Heated Surface LxW (mm) External LxW (mm) Nominal Max. Power (W)
Model Part Number
HTP-MB1-L18W18-200_PRF
Heated Surface LxW (mm)
180×180
External LxW (mm)
180×180
Nominal Max. Power (W)
800
Model Part Number
HTP-MB1-L26W26-200_PRF
Heated Surface LxW (mm)
260×260
External LxW (mm)
260×260
Nominal Max. Power (W)
1000
Model Part Number
HTP-MB1-L30W18-200_PRF
Heated Surface LxW (mm)
300×180
External LxW (mm)
300×180
Nominal Max. Power (W)
1200
Model Part Number
HTP-MB1-L30W30-200_PRF
Heated Surface LxW (mm)
300×300
External LxW (mm)
300×300
Nominal Max. Power (W)
1600
Model Part Number
HTP-MB1-L40W18-200_PRF
Heated Surface LxW (mm)
400×180
External LxW (mm)
400×180
Nominal Max. Power (W)
1600
Model Part Number
HTP-MB1-L40W30-200_PRF
Heated Surface LxW (mm)
400×300
External LxW (mm)
400×300
Nominal Max. Power (W)
1800
Model Part Number
HTP-MB1-L40W40-200_PRF
Heated Surface LxW (mm)
400×400
External LxW (mm)
400×400
Nominal Max. Power (W)
2000

Important Ordering Notes

Ordering Example:
HTP-MB1-L40W18-200: This Part Number includes one HTP-MB1-200 Precision Heated Plate having 400x180mm heated surface.