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Ensuring uniform attachment of the heat-treated substrate to the heated surface and significantly enhancing heat transfer
THERMANSYS designed its HTP-MB1-300_PRF Vacuum Chuck Heated Plates family to offer precise and uniform surface temperature control. Featuring a perforated plate on top of the heated body, this design allows for air suction through the holes, ensuring uniform attachment of the heat-treated substrate to the heated surface and significantly enhancing heat transfer. These plates are an ideal choice for heating thin film substrates, wafers, or flexible membranes.
| Model Part Number | Heated Surface LxW (mm) | External LxW (mm) | Nominal Max. Power (W) |
|---|---|---|---|
|
HTP-MB1-L18W18-300_PRF |
180×180 |
180×180 |
1000 |
|
HTP-MB1-L26W26-300_PRF |
260×260 |
260×260 |
1200 |
|
HTP-MB1-L30W18-300_PRF |
300×180 |
300×180 |
1400 |
|
HTP-MB1-L30W30-300_PRF |
300×300 |
300×300 |
1800 |
|
HTP-MB1-L40W18-300_PRF |
400×180 |
400×180 |
1800 |
|
HTP-MB1-L35W35-300_PRF |
350×350 |
350×350 |
2000 |
|
HTP-MB1-L40W30-300_PRF |
400×300 |
400×300 |
2000 |
|
HTP-MB1-L40W40-300_PRF |
400×400 |
400×400 |
2200 |
Ordering Example:
HTP-MB1-L40W18-300_PRF: This Part Number includes one HTP-MB1-300 PRF Precision Vacuum Chuck Heated Plate having
400x180mm heated surface.
Thermanys, a leading technology firm, is relied upon by prestigious technical universities, research centers, and private high-tech laboratories. Our objective is to develop exceptionally reliable and cutting-edge products, prioritizing user ease-of-use as a central strategy.
Thermanys, a leading technology firm, is relied upon by prestigious technical universities, research centers, and private high-tech laboratories. Our objective is to develop exceptionally reliable and cutting-edge products, prioritizing user ease-of-use as a central strategy.
