Thermansys designed its entire Vacuum Chuck Heated Plates family to offer precise and uniform surface temperature control. Featuring a perforated plate on top of the heated body, this design allows for air suction through the holes, ensuring uniform attachment of the heat-treated substrate to the heated surface and significantly enhancing heat transfer.

These plates are an ideal choice for heating thin film substrates, wafers, or flexible membranes.

A hose connector at the side of the hot plate allows for an external pump connection. The Vacuum Hot Plate’s control box provides a power output for the pump, whose on-off operation can be controlled through the system interface.

Suitable for many applications including Electronics/Semiconductors, Pharmaceuticals/Cosmetics, Plastics, Agricultural and other.