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Rapid Temperature Process System

Design to provide Rapid Heat up 

Thermansys designed and developed Rapid Thermal Process Reactor (RTP) system to provide rapid heat up for material development associated with Ceramic and Li batteries.

Thermansys’ RTP system features a reactor tube connected to an inert glove box, allowing the operator to place samples without removing them from the glove box. A specially designed flange is installed on the glove box side, where the RTP tube reactor is gas-tight connected from the exterior and isolated from the glove box. A quick clamp flange inside the glove box permits the user to open and place the sample into the RTP reactor tube after the system has brought the glove box and RTP reactor to pressure and gas species equilibrium.

The RTP system is equipped with an RCT-AW1-T-1300 tube furnace model, installed on a linear motion station that allows for furnace movement along the reactor tube length. The operator places the sample inside the reactor tube in a position outside the furnace’s hot zone. The furnace, preheated to the desired temperature, is then moved towards the sample, rapidly increasing its temperature. As shown in the graph beside, the sample temperature rises from 400°C to 1100°C within approximately 180 seconds.

This system features a vacuum system downstream of the reactor and a gas flow system upstream of the reactor, integrated by the Pyromodular PM-GFP module unit. The gas flow system consists of a necessary manifold, valves, and mass flow controllers for the control of various gases.

The reactor is equipped with a GSF_A flange End Gas Sealing Flange downstream of the reactor and a special flange designed to connect the RTP system with the glove box.

The quartz tube reactor is covered by the RCT-AW1-T-D7L22_1300 tube furnace. The system’s maximum operating temperature is 1100°C due to the maximum operating temperature of the quartz tube. For higher operating temperatures, Thermansys can provide similar solutions using silicon carbide or sapphire tubes.

The RTP system is fully software controlled and monitored. Using Pyrologism 2.0 software as a base, we expanded the software capabilities to include the system’s extra functionalities. The screen capture beside shows the Pyrologism tab specially developed for operating the unit’s additional features.