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Vacuum Chuck Hot Plates

Controlled and monitored through a flexible conduit, using a remote control box

200, 250 or 300°C

THERMANSYS designed its entire Vacuum Chuck Heated Plates family to offer precise and uniform surface temperature control. Featuring a perforated  plate on top of the heated body, this design allows for air suction through the holes, ensuring uniform attachment of the heat-treated substrate to the heated surface and significantly enhancing heat transfer. These plates are an ideal choice for heating thin film substrates, wafers, or flexible membranes.

Vacuum Chuck Hot Plates
Max Temperature 200°C
Vacuum Chuck Hot Plates
Max Temperature 200°C
Vacuum Chuck Hot Plates
Max Temperature 250°C
Vacuum Chuck Hot Plates
Max Temperature 300°C

Hot Plate FAQs

Our Vacuum Chuck Hot plates are equipped with a perforated Anodized Aluminum plate on top of the heated body. Vacuum can be applied through the holes, creating negative pressure at the surface, which securely holds the heat-treated sample in close contact with the heated plate. Each hot plate is equipped with a hose for an external pump connection. The pump is not included as standard however its use is essential for vacuum operation. The HTP-CPU-A3 control box includes a power outlet, allowing the pump to be powered and controlled directly through the controller by the operator in an ON/OFF mode. Note that pressure control is not provided. To ensure proper adhesion of the sample and the heated surface, it’s important to cover all surface holes; therefore, each of our Vacuum Chuck Hot Plate models comes with a silicone rubber membrane, which can be cut to cover any areas not occupied by the sample.

Our Vacuum Chuck Hot plates are an ideal choice for heating thin film substrates, wafers, or flexible membranes.

Our Precision Hot Plates for Vacuum Chamber/ Glove Box feature a smooth, flat stainless steel surface and are designed for operation inside sealed chambers such as glove boxes and vacuum chambers. These hot plates are controlled and monitored by a remote control box through a flexible conduit, allowing the heated plate body to function within closed vacuum chambers or other controlled atmosphere containers while the control box remains outside. For such applications, a special vacuum (and pressure) sealing feedthrough is available, ensuring a leak-free passage of the interconnection conduit into the chamber.

Our Precision Hot Plates for Vacuum Chamber/ Glove Box are an ideal choice for use in glove boxes and glove box antechambers.

 

The HTP-MAx-xxx standard hot plate features a stainless steel shield border around the heated surface to help prevent accidental touch. This design has a larger overall plate footprint than the heated surface area, making it ideal for general-purpose laboratory bench use where there may be frequent movement around the hot plate. However, it’s less suited for applications where extensive surface spillage could occur.

The electrical connector and pump hose connector are positioned on the sides of the device. Additionally, Standard Design hot plates are equipped with an LED indicator on the top to signal when the heater is ON and the surface may be hot.

hot plates

The HTP-MBx-xxx compact design has a total plate footprint equal to the heated surface area, as it does not include the low-temperature shield border.

Customers often select Compact Design hot plates for applications in limited spaces, such as glove boxes or when integrating into other assemblies, or when the possibility of significant liquid spillage on the surface exists.

In this design, the electrical connector and also the pump hose connector are located at the bottom of the device. This setup allows tubes and cables to bend and exit within the device’s footprint, conserving space and offering additional protection for the internal circuitry against potential surface spillage.

Compact design hot plates do not have an LED indicator on top.